- Tytuł:
- Thermal Desorption of Argon Implanted into Gallium Arsenide
- Autorzy:
-
Turek, Marcin
Droździel, Andrzej
Pyszniak, Krzysztof
Węgierek, Paweł - Powiązania:
- https://bibliotekanauki.pl/articles/2201837.pdf
- Data publikacji:
- 2022
- Wydawca:
- Stowarzyszenie Inżynierów i Techników Mechaników Polskich
- Tematy:
-
thermal desorption spectroscopy
gallium arsenide
ion implantation - Opis:
- Thermal desorption of Ar implanted with energies 150 keV and 100 keV with fluence 1×10^16 cm^-2 into GaAs is considered. A sudden release of Ar is observed in temperature range 1100 -1180 K as a single narrow peak in TDS (Thermal Desorption Spectroscopy) spectra. This is accompanied by a strong background signal from atmospheric Ar trapped in various parts of the spectrometer. Desorption peak shift analysis allows estimation of desorption activation energy values - these are 3.6 eV and 2.5 eV for implantation energies 150 keV and 100 keV, respectively. These results are comparable to that measured for Ar implanted into germanium target.
- Źródło:
-
Advances in Science and Technology. Research Journal; 2022, 16, 4; 318--326
2299-8624 - Pojawia się w:
- Advances in Science and Technology. Research Journal
- Dostawca treści:
- Biblioteka Nauki
Artykuł