- Tytuł:
- Effect of substrate temperature on the crystal properties of LiMn2O4 films prepared by RF magnetron sputtering
- Autorzy:
-
Isai, M.
Nakamura, K.
Hosokawa, T.
Izumichi, T.
Sekikawa, S. - Powiązania:
- https://bibliotekanauki.pl/articles/384289.pdf
- Data publikacji:
- 2009
- Wydawca:
- Sieć Badawcza Łukasiewicz - Przemysłowy Instytut Automatyki i Pomiarów
- Tematy:
-
LiMn2O4 thin film
RF magnetron sputtering
Li secondary batteries - Opis:
- The LiMn2O4 films for Li secondary batteries have been prepared by a RF magnetron sputtering method. The LiMn2O4 powder was used as a target material. The deposition rate, XRD, and surface morphology were investigated as a function of substrate temperature (Tsub). It was found that the deposition rate had a peak at around the of 200 °C. This research was also designed for preventing the target material being oxidized during the reactive sputtering process. A quartz tube was inserted between shutter and target. It seems that the quartz tube is effective to prevent oxidation of target material.
- Źródło:
-
Journal of Automation Mobile Robotics and Intelligent Systems; 2009, 3, 4; 65-68
1897-8649
2080-2145 - Pojawia się w:
- Journal of Automation Mobile Robotics and Intelligent Systems
- Dostawca treści:
- Biblioteka Nauki
Artykuł