- Tytuł:
- Electrical schematics for 1D analysis of a bridge type MEMS capacitive switch
- Autorzy:
-
Kula, S.
Lup, A. -S. - Powiązania:
- https://bibliotekanauki.pl/articles/97248.pdf
- Data publikacji:
- 2014
- Wydawca:
- Politechnika Poznańska. Wydawnictwo Politechniki Poznańskiej
- Tematy:
-
RF MEMS capacitive switch
electrical equivalent schematic
multi-physics simulations - Opis:
- In this paper, a robust method to analyse a simple model of a RF (Radio Frequency) MEMS (Micro Electro-Mechanical Systems) capacitive switch is depicted. The method is based on multi-physics phenomenons and interdependencies between different physics domains. A component, which enables to link variety of the physics domains is an electrical equivalent circuit. Such equivalent circuit has been created in LTSpice software, which is a freeware circuits simulator. This electrical equivalent schematic enables to run static, frequency domain, transient analysis. The presented method enables simultaneous simulations in an electrical, mechanical and electro-mechanical domain. Obtained results were verified by the comparison with the results of a commercial software, a scientific software and data from literature. The method, presented in the paper gives robust, accurate results in the one-dimensional analysis domain of simple mechanical resonators, which are simplified mechanical models of the RF MEMS capacitive switches.
- Źródło:
-
Computer Applications in Electrical Engineering; 2014, 12; 407-421
1508-4248 - Pojawia się w:
- Computer Applications in Electrical Engineering
- Dostawca treści:
- Biblioteka Nauki
Artykuł