Temat: wet-chemical process - Katalog OPAC zbiorów

Skocz do pozycji: 1.

Tytuł:: Gate dielectrics: process integration issues and electrical properties
Autorzy:: Schwalke, U.
Powiązania:: https://bibliotekanauki.pl/articles/308978.pdf
Data publikacji:: 2005
Wydawca:: Instytut Łączności - Państwowy Instytut Badawczy
Tematy:: high-k dielectrics
CMOS
Pr2O3
process integration
resist removal
wet chemical cleaning
wet chemical etching
RIE
Opis:: In this work we report on the process integration of crystalline praseodymium oxide (Pr2O3) high-k gate dielectric. Key process steps that are compatible with the high-k material have been developed and were applied for realisation of MOS structures. For the first time Pr2O3 has been integrated successfully in a conventional MOS process with n+ poly-silicon gate electrode. The electrical properties of Pr2O3 MOS capacitors are presented and discussed.
Źródło:: Journal of Telecommunications and Information Technology; 2005, 1; 7-10
1509-4553
1899-8852
Pojawia się w:: Journal of Telecommunications and Information Technology
Dostawca treści:: Biblioteka Nauki

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Skocz do pozycji: 2.

Tytuł:: Effects Of Process Parameters On Cu Powder Synthesis Yield And Particle Size In A Wet-Chemical Process
Wpływ parametrów procesu na wydajność syntezy proszku Cu i wielkości cząstek w procesie mokrym chemicznym
Autorzy:: Shin, Y. M.
Lee, J. H.
Powiązania:: https://bibliotekanauki.pl/articles/354168.pdf
Data publikacji:: 2015
Wydawca:: Polska Akademia Nauk. Czytelnia Czasopism PAN
Tematy:: wet-chemical process
micron-size Cu powder
Synthesis yield
particle size
gibbs free energy difference
proszek Cu
proces chemiczny mokry
wydajność syntezy
rozmiar cząsteczki
różnica energii swobodnej Gibbsa
Opis:: This study presents a simple wet-chemical process to prepare several micron-size Cu powders. Moreover, changes in powder synthesis yield and particle size are examined with different solvents, synthesis temperatures, and amounts of reducing agent during the synthesis. As a reducing agent and capping agent, L-ascorbic acid and polyvinyl pyrrolidone were used, respectively. The yields in distilled water or an ethylene glycol (EG)/distilled water mixture were higher than that in EG alone, and the yield increased with increasing temperature owing to a lower Δ Gred value. Increasing the L-ascorbic acid concentration also increased the yield. The Cu powder synthesized in 3 h at 90°C in distilled water with 272.8 mM of L-ascorbic acid showed the lowest average particle size of 2.52 μm, indicating mechanisms of short burst nucleation and reduced growth via the increased reduction rate of Cu ions. It is estimated that the nucleation step was nearly completed within 10 min in this system. The Cu powders synthesized in an ethylene glycol/distilled water mixture presented an average particle size of 3.76 μm and the highest yield of 87.9%.
Źródło:: Archives of Metallurgy and Materials; 2015, 60, 2B; 1247-1250
1733-3490
Pojawia się w:: Archives of Metallurgy and Materials
Dostawca treści:: Biblioteka Nauki

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