- Tytuł:
- Methane cracking and secondary hydrocarbon generation in inductively coupled RF plasmas
- Autorzy:
-
Tabarés, F. L.
Alegre, D.
Mozetič, M.
Vesel, A. - Powiązania:
- https://bibliotekanauki.pl/articles/146424.pdf
- Data publikacji:
- 2012
- Wydawca:
- Instytut Chemii i Techniki Jądrowej
- Tematy:
-
plasma
RF discharges
hydrocarbon cracking
methane reforming
plasma-assisted chemical vapour deposition (PACVD)
carbon films - Opis:
- Pure methane plasmas have been produced in an inductively coupled radio frequency (ICRF) reactor with quartz walls in the absence of carbon film deposition. A differentially pumped mass spectrometer was used for the recording of the secondary hydrocarbon species produced in the reactor. The functional dependences of these species with plasma parameters has been analyzed and tentative mechanisms for their formation have been formulated. High power per molecule ratio promotes methane decomposition and acetylene formation.
- Źródło:
-
Nukleonika; 2012, 57, 2; 287-290
0029-5922
1508-5791 - Pojawia się w:
- Nukleonika
- Dostawca treści:
- Biblioteka Nauki
Artykuł