- Tytuł:
- Generation of Large-area Arrays of Aperiodic Functional Micro/nano Structures Using Phase Shift Interferometry
- Autorzy:
-
Pearly Princess, J.
Alfred Kirubaraj, A.
Christina Sophia, S.
Senith, S.
Jino Ramson, S. R. - Powiązania:
- https://bibliotekanauki.pl/articles/2055275.pdf
- Data publikacji:
- 2022
- Wydawca:
- Polska Akademia Nauk. Czytelnia Czasopism PAN
- Tematy:
-
laser interference lithography
LIL
pattern structures
periodic patterns
aperiodic patterns
phase shift interferometry
PSI - Opis:
- Phase shift interferometry (PSI) derived from interference technique as greater surface characterization technique based on the interference information recorded during a controlled phase shift. This research shows the development of micro/nano structures using phase shift interferometry. (PSI) is the process of developing the complex pattern structure using variable phase angle between two or more beams aligned to obtain functional aperiodic arrays. We have designed and modelled the PSI and simulated through MATLAB in 2D and 3D pattern structures. The PSI was performed in two process analysis. First, without PSI referring normal interference technique. Second, with PSI referring position of laser beams in quadrant-based alignment. The obtained results show the minimum feature structure was measured as 12 nm. This feature size developed under phase shift interferometry (PSI) produces minimum feature size compared to the existing interferometry technique. This study gives the promising increased fabrication area could develop large area arrays structures.
- Źródło:
-
International Journal of Electronics and Telecommunications; 2022, 68, 1; 91--96
2300-1933 - Pojawia się w:
- International Journal of Electronics and Telecommunications
- Dostawca treści:
- Biblioteka Nauki
Artykuł