- Tytuł:
- Characterization of the ionization process inside a miniature glow-discharge micropump
- Autorzy:
-
Grzebyk, T.
Górecka-Drzazga, A. - Powiązania:
- https://bibliotekanauki.pl/articles/200204.pdf
- Data publikacji:
- 2018
- Wydawca:
- Polska Akademia Nauk. Czytelnia Czasopism PAN
- Tematy:
-
ion-sorption micropump
MEMS-type micropump
gas discharge
ionization
mikropompa jonowo-sorpcyjna
mikropompa typu MEMS
wyładowanie gazu
jonizacja - Opis:
- The article presents a detailed characterization of the ionization process taking place inside a miniature MEMS-type ion-sorption vacuum pump, based on the Penning pump architecture. Influence of a variety of parameters on the discharge current has been investigated. These include: magnetic field, type of material used for the electrodes as well as horizontal and vertical dimensions of the micropump. It was found that the micropump works efficiently as long as the magnetic field is higher than 0.3 T, and the pumping cell’s dimensions exceed 1x1x1 mm3. Best results have been obtained for copper and aluminum cathodes and low resistivity silicon anodes.
- Źródło:
-
Bulletin of the Polish Academy of Sciences. Technical Sciences; 2018, 66, 2; 173-178
0239-7528 - Pojawia się w:
- Bulletin of the Polish Academy of Sciences. Technical Sciences
- Dostawca treści:
- Biblioteka Nauki
Artykuł