Temat: gas phase epitaxy - Katalog OPAC zbiorów

Skocz do pozycji: 1.

Tytuł:: On changing the properties of a multilayer structure by preliminary processing of a substrate
Autorzy:: Pankratov, Evgeny L.
Powiązania:: https://bibliotekanauki.pl/articles/29520076.pdf
Data publikacji:: 2022
Wydawca:: Akademia Górniczo-Hutnicza im. Stanisława Staszica w Krakowie. Wydawnictwo AGH
Tematy:: gas phase epitaxy
improvement of properties of films
analytical approach for modeling
Opis:: In this paper, the effect of the preliminary processing of a substrate on the properties of a grown heterostructure is investigated. It is shown that the growth of an epitaxial layer on a buffer layer after preliminary annealing (before the growth) makes it possible to decrease the value of mismatch-induced stress. An analytical approach has been introduced for the analysis of mass and heat transfer in a multilayer structure accounting for mismatch-induced stress.
Źródło:: Computer Methods in Materials Science; 2022, 22, 2; 89-100
2720-4081
2720-3948
Pojawia się w:: Computer Methods in Materials Science
Dostawca treści:: Biblioteka Nauki

Artykuł

Skocz do pozycji: 2.

Tytuł:: A model for changing the technological process for the growth of epitaxial layers by means of the heating of the growth zone
Autorzy:: Pankratov, Evgeny L.
Powiązania:: https://bibliotekanauki.pl/articles/29520098.pdf
Data publikacji:: 2021
Wydawca:: Akademia Górniczo-Hutnicza im. Stanisława Staszica w Krakowie. Wydawnictwo AGH
Tematy:: epitaxy
gas phase
improvement of properties
film
analytical approach
modeling
Opis:: The nonstationary transfer of heat during epitaxial layer growth in gas phase epitaxy reactors is analyzed within the work. Based on this analysis, several recommendations on the organization of the heating of the growth zone to increase the homogeneity of the epitaxial layers were formulated. An approach to analyze the transfer of heat during epitaxial layer growth from the gas phase is also introduced. The approach leads to the possibility of simultaneously accounting for heat transfer nonlinearity and changes of parameters of heat transfer in both space and time.
Źródło:: Computer Methods in Materials Science; 2021, 21, 1; 5-12
2720-4081
2720-3948
Pojawia się w:: Computer Methods in Materials Science
Dostawca treści:: Biblioteka Nauki

Artykuł

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