- Tytuł:
- Correlation between electric parameters of carbon layers and their capacity for field emission
- Autorzy:
- Gronau, R.
- Powiązania:
- https://bibliotekanauki.pl/articles/308655.pdf
- Data publikacji:
- 2007
- Wydawca:
- Instytut Łączności - Państwowy Instytut Badawczy
- Tematy:
-
carbon layers
diamond-like carbon (DLC)
field emission
RF PACVD
AFM
capacitance-voltage (C-V)
current-voltage (I-V) - Opis:
- The aim of this work is to study a possibility of field electron emission from carbon layers produced by radio frequency plasma chemical vapor deposition (RF PCVD) method. A correlation between electric parameters of the layers and the ability to produce electron emission is also studied through material (AFM) and electrical (C-V, I-V) characterization of the obtained layers. It is demonstrated that the layers deposited with the highest self-bias exhibit the highest capacity for electron emission.
- Źródło:
-
Journal of Telecommunications and Information Technology; 2007, 3; 37-38
1509-4553
1899-8852 - Pojawia się w:
- Journal of Telecommunications and Information Technology
- Dostawca treści:
- Biblioteka Nauki
Artykuł