- Tytuł:
- $WO_3-Pd$ Structure in SAW Sensor for Hydrogen Detection
- Autorzy:
-
Hejczyk, T.
Urbańczyk, M. - Powiązania:
- https://bibliotekanauki.pl/articles/1493196.pdf
- Data publikacji:
- 2011-10
- Wydawca:
- Polska Akademia Nauk. Instytut Fizyki PAN
- Tematy:
-
43.25.Fe
77.65.Dq
68.35.Iv
07.07.Df - Opis:
- In the paper a new sensor structure for surface acoustic wave gas system is presented. A bilayer structure $WO_3-Pd$ thin films may be useful for hydrogen detection in low concentration in air. A bilayer sensor structure of tungsten oxide $WO_3$ with a very thin catalytic film of palladium on the top has been studied for gas-sensing application at room temperature (about 25°C) in surface acoustic wave system. The bilayer structure of $WO_3$ layers with a thickness of about 50 nm, 100 nm and 150 nm was made onto a $LiNbO_3$ Y-cut Z-propagating substrate by means of the vacuum sublimation method using a special aluminum mask. The vapor source consisted of commercially available $WO_3$ powder (Fluka 99.9%) and molybdenum heater. The thin palladium (Pd) layer (about 10 nm) was made separately on each $WO_3$ layer by means of vapor deposition in high vacuum. There have been investigated three structures: 50 nm $WO_3$ + 10 nm Pd, 100 nm $WO_3$ + 10 nm Pd and 150 nm $WO_3$ + 10 nm Pd in three canal surface acoustic wave system with reference oscillator. Numerical results obtained by analysis of the surface acoustic wave gas sensor model have been compared with experimental results.
- Źródło:
-
Acta Physica Polonica A; 2011, 120, 4; 616-620
0587-4246
1898-794X - Pojawia się w:
- Acta Physica Polonica A
- Dostawca treści:
- Biblioteka Nauki
Artykuł