- Tytuł:
- A low-cost, simple optical setup for a fast scatterometry surface roughness measurements with nanometric precision
- Autorzy:
-
Kucharski, D.
Zdunek, H. - Powiązania:
- https://bibliotekanauki.pl/articles/200883.pdf
- Data publikacji:
- 2020
- Wydawca:
- Polska Akademia Nauk. Czytelnia Czasopism PAN
- Tematy:
-
scatterometry
surface texture
optical measurement systems
surface metrology
surface roughness - Opis:
- We present a prototype of a simple, low-cost setup for a fast scatterometric surface texture measurements. We used a total integrated scatter method (TIS) with a semiconductor laser (λ = 638 nm) and a Si photodiode. Using our setup, we estimated the roughness parameters Rq for two reference surfaces (Al mirrors with flatness λ/10) and seven equal steel plates to compare. The setup is easily adaptable for a fast, preliminary manufacturing quality control. We show is possible to construct a low-cost measurement system with nanometric precision.
- Źródło:
-
Bulletin of the Polish Academy of Sciences. Technical Sciences; 2020, 68, 3; 485-490
0239-7528 - Pojawia się w:
- Bulletin of the Polish Academy of Sciences. Technical Sciences
- Dostawca treści:
- Biblioteka Nauki