- Tytuł:
- A Novel Solid State Pulsed Power Module for Excimer Laser
- Autorzy:
- Strowitzki, C.
- Powiązania:
- https://bibliotekanauki.pl/articles/1807875.pdf
- Data publikacji:
- 2009-06
- Wydawca:
- Polska Akademia Nauk. Instytut Fizyki PAN
- Tematy:
- 84.70.+p
- Opis:
- For effective excimer laser pumping high voltage pulses with the pulse duration of 100 ns and energies from a fraction of joules to some 10 joules are necessary. For the generation of these pulses traditionally Thyratron circuits are used. The limited lifetime and repetition rates of such a device does not fulfil not the requirements of a modern excimer laser. State of the art is a solid state circuit with IGBT switches, high voltage pulse transformer and pulse compression networks. Due to the many stages, complexity is high and efficiency is moderate. To overcome this limitation a new solid state circuit for excimer laser pumping is developed. The circuit works without magnetic pulse compression. The switch is made by a stack of "off the self" MOSFETs and SiC diodes. In the presentation the general design and its calculation, diode and switch qualification and test results are presented.
- Źródło:
-
Acta Physica Polonica A; 2009, 115, 6; 992-994
0587-4246
1898-794X - Pojawia się w:
- Acta Physica Polonica A
- Dostawca treści:
- Biblioteka Nauki
Artykuł