- Tytuł:
- Effect of high electrostatic actuation on thermoelastic damping in thin rectangular microplate resonators
- Autorzy:
-
Mohammadi, A. K.
Ali, N. A. - Powiązania:
- https://bibliotekanauki.pl/articles/280595.pdf
- Data publikacji:
- 2015
- Wydawca:
- Polskie Towarzystwo Mechaniki Teoretycznej i Stosowanej
- Tematy:
-
microplate resonator
thermoelastic damping
high polarization voltage - Opis:
- In this paper, a micro resonator is modeled as a thin rectangular microplate with thermoelastic damping that is actuated electrostatically. Large static deformation due to high polarization voltage is considered, and vibration of microplate occurs around the static de- flection. Due to the effect of thermoelastic damping, the frequency of vibration is a complex value that is used to determine the quality factor of thermoelastic damping. Also, the pull-in voltage is considered because nonlinear properties are more appeared when approaching the polarization voltage to the pull-in voltage.
- Źródło:
-
Journal of Theoretical and Applied Mechanics; 2015, 53, 2; 317-329
1429-2955 - Pojawia się w:
- Journal of Theoretical and Applied Mechanics
- Dostawca treści:
- Biblioteka Nauki