- Tytuł:
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Analiza obrazów powierzchni w mikroskopii bliskich oddziaływań
Surface Image Analysis in Scanning Probe Microscopy - Autorzy:
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Jóźwiak, G.
Gotszalk, T. - Powiązania:
- https://bibliotekanauki.pl/articles/155430.pdf
- Data publikacji:
- 2010
- Wydawca:
- Stowarzyszenie Inżynierów i Techników Mechaników Polskich
- Tematy:
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mikroskopia bliskich oddziaływań
analiza topografii powierzchni
analiza motywów 3D
scanning probe microscopy
surface analysis
3D motif analysis - Opis:
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W pracy przedstawiono wybrane metody analizy powierzchni (ISO 25178) wskazując na rodzaj informacji, jaką można za pomocą danej metody uzyskać. Opisywane algorytmy i procedury zostały zaimplementowane w opracowanym w Wydziałowym Zakładzie Metrologii Mikro- i Nanostruktur Politechniki Wrocławskiej programie TOPOGRAF. W pracy zaprezentowano przykładowe wyniki działania zaimplementowanych algorytmów i procedur.
Progress in the scanning probe microscopy makes it become a much more common tool. In the paper the principle of operation of the scanning probe microscope is presented. It is emphasized that the measurement result is an image of the investigated surface. Two groups of parameters connected with lateral properties of the tested surface image are introduced. The first group of parameters is connected with the image autocorrelation function and two dimensional Fourier transform. The texture aspect ratio and surface autocorrelation length (Fig. 1) are given as examples of the autocorrelation parameters. The second group of parameters is related to the so called 3D motif analysis. At the first stage of this analysis the image is segmented by means of the watershed segmentations algorithm. At the second stage the statistics connected with the shape and dimensions of the segments are calculated. The segmentation algorithm as well as the parameters describing shape and dimensions of segments (Fig 2) are presented in the paper. Due to the quantum nature of the micro- and nano-world, the uncertainty of products of the micro and nanotechnology will always be greater than that of products of the conventional technology. For this reason there is strong demand for flexible techniques capable of handling this increased uncertainty. The 3D motif analysis is very well suited to meet this challenge, since it enables the extension of the basic set of the parameters describing segments. Therefore the segment parameters might be adapted to the function of the investigated nanostructures. The images presented in the paper were obtained by means of the TOPOGRAF software that is developed at the Division of Micro- and Nanostructures Metrology. - Źródło:
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Pomiary Automatyka Kontrola; 2010, R. 56, nr 1, 1; 46-47
0032-4140 - Pojawia się w:
- Pomiary Automatyka Kontrola
- Dostawca treści:
- Biblioteka Nauki
Artykuł