- Tytuł:
- GHz Range SAW Transducers Using Electron Beam Lithography
- Autorzy:
-
Yamanouchi, Kazuhiko
Meguro, Toshiyasu
Cho, Yasuo - Powiązania:
- https://bibliotekanauki.pl/articles/896301.pdf
- Data publikacji:
- 1990
- Wydawca:
- Uniwersytet Łódzki. Wydawnictwo Uniwersytetu Łódzkiego
- Opis:
- Nanometer electrodes of the order of 0.085 μm width have been fabricated using direct electron beam lithography, normal lift-off techniques and 0₂-plasma cleaning system. These techniques have been applied to Inter-Digital Transducers (IDТ) as surface acoustic wave (SAW) transducers in the GHz-range. We performed SAW filter experiments at GHz-range. Filters with minimum insertion loss of 16.0 dB at the center frequency of 5 GHz and 27 dB at 11 GHz were obtained.
- Źródło:
-
Acta Physicae Superficierum; 1990, 2
0867-2997 - Pojawia się w:
- Acta Physicae Superficierum
- Dostawca treści:
- Biblioteka Nauki
Artykuł