- Tytuł:
- Ultrathin NbN Films for Superconducting Single-Photon Detectors
- Autorzy:
-
Słysz, W.
Guziewicz, M.
Borysiewicz, M.
Domagała, J.
Pasternak, I.
Hejduk, K.
Rzodkiewicz, W.
Ratajczak, J.
Bar, J.
Węgrzecki, M.
Grabiec, P.
Grodecki, R.
Węgrzecka, I.
Sobolewski, R. - Powiązania:
- https://bibliotekanauki.pl/articles/1504147.pdf
- Data publikacji:
- 2011-07
- Wydawca:
- Polska Akademia Nauk. Instytut Fizyki PAN
- Tematy:
-
74.62.Bf
74.78.-w
81.15.Cd
81.15.Jj - Opis:
- We present our research on fabrication and structural and transport characterization of ultrathin superconducting NbN layers deposited on both single-crystal $Al_2O_3$ and Si wafers, and $SiO_2$ and $Si_3N_4$ buffer layers grown directly on Si wafers. The thicknesses of our films varied from 6 nm to 50 nm and they were grown using reactive RF magnetron sputtering on substrates maintained at the temperature 850°C. We have performed extensive morphology characterization of our films using the X-ray diffraction method and atomic force microscopy, and related the results to the type of the substrate used for the film deposition. Our transport measurements showed that even the thinnest, 6 nm thick NbN films had the superconducting critical temperature of 10-12 K, which was increased to 14 K for thicker films.
- Źródło:
-
Acta Physica Polonica A; 2011, 120, 1; 200-203
0587-4246
1898-794X - Pojawia się w:
- Acta Physica Polonica A
- Dostawca treści:
- Biblioteka Nauki
Artykuł