- Tytuł:
- Ion Beam Sputtering Monitored by Optical Spectroscopy
- Autorzy:
-
El Fqih, M.
Fournier, P. - Powiązania:
- https://bibliotekanauki.pl/articles/1808025.pdf
- Data publikacji:
- 2009-05
- Wydawca:
- Polska Akademia Nauk. Instytut Fizyki PAN
- Tematy:
-
68.49.Sf
79.20.Rf - Opis:
- Optical spectroscopy gives a simple means to follow the evolution of the surface composition during ion beam sputtering. This is illustrated by three examples: air oxidised metals (Al and Cu), various CuAl alloys and the $Cu_{98}Be_2$ alloy. Several time scales are distinguished, corresponding to different processes: the elimination of surface contaminants, the removal of the corroded layer. The implications for the use of ion beam optical spectroscopy in surface analysis are discussed.
- Źródło:
-
Acta Physica Polonica A; 2009, 115, 5; 901-904
0587-4246
1898-794X - Pojawia się w:
- Acta Physica Polonica A
- Dostawca treści:
- Biblioteka Nauki
Artykuł