- Tytuł:
- Decoupled Mems vibrating gyroscope simulations based on finite element method
- Autorzy:
- Nazdrowicz, Jacek
- Powiązania:
- https://bibliotekanauki.pl/articles/398090.pdf
- Data publikacji:
- 2018
- Wydawca:
- Politechnika Łódzka. Wydział Mikroelektroniki i Informatyki
- Tematy:
-
gyroscope
comb structure
MEMS
Finite Element Method
giroskop
Metoda Elementów Skończonych - Opis:
- In this paper the analysis of a MEMS vibrating gyroscope model is presented. The FEM analysis of the 3D structure has been performed in COMSOL Multiphysics software. Author took particular attention on mechanical properties particular parts of this device especially combs (used in electrostatical actuators and sensors) in drive and sense directions. For further electrostatic analysis (which is not covered in this article) this analysis has enormous meaning because any deformation of comb structure during operation influences on quality of electrostatic actuating and sensing. In this paper author performed stress results and deformation analysis in sense direction, however similar conclusions one can be drawn for drive direction.
- Źródło:
-
International Journal of Microelectronics and Computer Science; 2018, 9, 2; 66-71
2080-8755
2353-9607 - Pojawia się w:
- International Journal of Microelectronics and Computer Science
- Dostawca treści:
- Biblioteka Nauki
Artykuł