- Tytuł:
- Tailoring the Internal Evaporator for Effective Ion Beam Production - Volatile vs. Non-Volatile Substances
- Autorzy:
-
Turek, M.
Droździel, A.
Pyszniak, K.
Prucnal, S. - Powiązania:
- https://bibliotekanauki.pl/articles/1402239.pdf
- Data publikacji:
- 2015-11
- Wydawca:
- Polska Akademia Nauk. Instytut Fizyki PAN
- Tematy:
-
07.77.Ka
34.80.Dp
61.72.uj - Opis:
- Two different designs of the internal evaporator in an arc discharge ion source are presented, suitable either for volatile, or high-melting point substances. A matter of the evaporator size and placement in order to obtain its appropriate temperature and, therefore, a stable and intense ion beam, is considered. Basic ion source characteristics, i.e. the dependences of ion current and discharge voltage on the discharge and filament currents as well as on the external magnetic field flux density are shown and discussed in order to find optimal working conditions. The results of measurements for both volatile (P, Zn, Se, S) and non-volatile (Pd) are presented, showing the applicability of the design for ion implantation purposes.
- Źródło:
-
Acta Physica Polonica A; 2015, 128, 5; 939-942
0587-4246
1898-794X - Pojawia się w:
- Acta Physica Polonica A
- Dostawca treści:
- Biblioteka Nauki
Artykuł