Temat: MEMS - Katalog OPAC zbiorów

Skocz do pozycji: 1.

Tytuł:: Modal analysis of vibratory microgyroscopes
Autorzy:: Nazdrowicz, Jacek
Maj, Cezary
Jankowski, Mariusz
Szermer, Michał
Stawiński, Adam
Napieralski, Andrzej
Powiązania:: https://bibliotekanauki.pl/chapters/32083882.pdf
Data publikacji:: 2021
Wydawca:: Politechnika Białostocka. Oficyna Wydawnicza Politechniki Białostockiej
Tematy:: resonator
accelerometer
MEMS gyroscopes
Opis:: The aim of this paper is to bring up modal analysis of MEMS gyroscope operation with COMSOL and Matlab/SIMULINK software. Two different geometries are assumed and simulation results are presented. The other objective of the paper is to present modal analysis results by taking into consideration spring constants and variation in the damping coefficients as an effect of temperature variation.
Źródło:: Methods and tools in CAD – selected issues; 29-38
9788366391871
Dostawca treści:: Biblioteka Nauki

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Skocz do pozycji: 2.

Tytuł:: Fringing field modelling in MEMS capacitive comb-drive accelerometers
Autorzy:: Maj, Cezary
Nazdrowicz, Jacek
Stawiński, Adam
Powiązania:: https://bibliotekanauki.pl/chapters/32083885.pdf
Data publikacji:: 2021
Wydawca:: Politechnika Białostocka. Oficyna Wydawnicza Politechniki Białostockiej
Tematy:: Accelerometers
MEMS devices
fringing field
Opis:: Modelling is a crucial step in designing MEMS devices. It is needed to estimate the device performance without its fabrication. Initially, simple calculations are needed to verify the possibility of device production with a given performance and to know the basic parameters necessary to achieve the desired goals. Further, optimization is commonly performed in order to improve the design. Both steps require simulation methods that are very fast and precise enough to reduce time to market. In many cases, classical, precise FEM simulations are not necessary and simple analytical models are used. MEMS devices like accelerometers, commonly uses elements of simple shapes that can be easily described with simple analytical formulas. However, analytical modelling is getting more complicated in case of capacitive transduction. Typically, these devices operate in the range of linear response but nothing can be done to avoid the influence of non-uniform electric field. Due to fringing field, a capacitance is often underestimated when using classical parallel plate formula. Therefore, there is a need for proper fringing field modelling. In this chapter, analytical modelling of fringing field on an example of MEMS accelerometer is presented. Specific structure type known as comb-drive consists of many small capacitors that enhance the impact of fringing field. Accelerometers in all axes are analyzed. Moreover, Z-axis accelerometer induces different electric field distribution due to the use of thinned fingers. Thus, analytical formulas are derived for various conditions. Finally, the model is compared with Coventor MEMS+ and fabricated strictures are measured in order to validate analytical approach.
Źródło:: Methods and tools in CAD – selected issues; 15-27
9788366391871
Dostawca treści:: Biblioteka Nauki

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Skocz do pozycji: 3.

Tytuł:: Modeling of vibrating angular. Motion sensor in Matlab/SIMULINK
Autorzy:: Nazdrowicz, Jacek
Powiązania:: https://bibliotekanauki.pl/articles/397700.pdf
Data publikacji:: 2018
Wydawca:: Politechnika Łódzka. Wydział Mikroelektroniki i Informatyki
Tematy:: microelectromechanical systems
simulation model
microaccelerometer
MATLAB
SIMULINK
MEMS modeling
Simscape toolbox
mikroukład elektromechaniczny
model symulacyjny
mikroakcelerometr
modelowanie MEMS
SimScape
Opis:: This paper presents different models and results of simulations of MEMS vibrating gyroscope in Matlab/SIMULINK environment. Each model is created with different approach, using different blocks and different physics. Therefore author presents his proposal of mathematical, electrical equivalent and physical models. Results obtained from these models can give some hints regarding design and dimensions of some crucial parts of MEMS gyroscope. Here, decoupled vibrating sensor is considered, which minimize drive and sense motion mutual influence.
Źródło:: International Journal of Microelectronics and Computer Science; 2018, 9, 1; 27-32
2080-8755
2353-9607
Pojawia się w:: International Journal of Microelectronics and Computer Science
Dostawca treści:: Biblioteka Nauki

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Skocz do pozycji: 4.

Tytuł:: Decoupled Mems vibrating gyroscope simulations based on finite element method
Autorzy:: Nazdrowicz, Jacek
Powiązania:: https://bibliotekanauki.pl/articles/398090.pdf
Data publikacji:: 2018
Wydawca:: Politechnika Łódzka. Wydział Mikroelektroniki i Informatyki
Tematy:: gyroscope
comb structure
MEMS
Finite Element Method
giroskop
Metoda Elementów Skończonych
Opis:: In this paper the analysis of a MEMS vibrating gyroscope model is presented. The FEM analysis of the 3D structure has been performed in COMSOL Multiphysics software. Author took particular attention on mechanical properties particular parts of this device especially combs (used in electrostatical actuators and sensors) in drive and sense directions. For further electrostatic analysis (which is not covered in this article) this analysis has enormous meaning because any deformation of comb structure during operation influences on quality of electrostatic actuating and sensing. In this paper author performed stress results and deformation analysis in sense direction, however similar conclusions one can be drawn for drive direction.
Źródło:: International Journal of Microelectronics and Computer Science; 2018, 9, 2; 66-71
2080-8755
2353-9607
Pojawia się w:: International Journal of Microelectronics and Computer Science
Dostawca treści:: Biblioteka Nauki

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