- Tytuł:
- Study on the Breakdown Mechanism of Fabrication of Micro Channels in Fused Silica Substrates with ps Laser Pulses
- Autorzy:
-
Li, S.
Bai, Z.
Qin, S. - Powiązania:
- https://bibliotekanauki.pl/articles/1400288.pdf
- Data publikacji:
- 2013-01
- Wydawca:
- Polska Akademia Nauk. Instytut Fizyki PAN
- Tematy:
-
52.50.Jm
52.40.Hf
61.80.-x
42.62.-b - Opis:
- A new microchannel fabrication technology for fused silica substrate is presented. A mode-locked laser was used to fabricate straight microchannels in a fused silica substrate by laser plasma-induced plasma. The depth of the channels is up to 5 mm and there are no thermal cracks around the channel. We studied the ionization mechanism of optical breakdown formed by laser pulses and discussed the optical breakdown threshold. A mechanism is proposed to explain the formation of the microchannels and the characteristics of the microchannels are analyzed through the laser pulse characteristics.
- Źródło:
-
Acta Physica Polonica A; 2013, 123, 1; 67-72
0587-4246
1898-794X - Pojawia się w:
- Acta Physica Polonica A
- Dostawca treści:
- Biblioteka Nauki
Artykuł