- Tytuł:
- Diagnostics of micro- and nanostructure using the scanning probe microscopy
- Autorzy:
-
Gotszalk, T.
Janusz, P.
Marendziak, A.
Czarnecki, P.
Radojewski, J.
Szeloch, R. F.
Grabiec, P.
Rangelow, I. W. - Powiązania:
- https://bibliotekanauki.pl/articles/308801.pdf
- Data publikacji:
- 2005
- Wydawca:
- Instytut Łączności - Państwowy Instytut Badawczy
- Tematy:
-
scannig probe microscopy
microsystem
nanofabrication - Opis:
- In this paper we summarize the results of our research concerning the diagnostics of micro- and nanostructure with scanning probe microscopy (SPM). We describe the experiments performed with one of the scanning probe microscopy techniques enabling also insulating surfaces to be investigated, i.e., atomic force microscopy (AFM). We present the results of topography measurements using both contact and non-contact AFM modes, investigations of the friction forces that appear between the microtip and the surface, and experiments connected with the thermal behaviour of integrated circuits, carried out with the local resolution of 20 nm.
- Źródło:
-
Journal of Telecommunications and Information Technology; 2005, 1; 41-46
1509-4553
1899-8852 - Pojawia się w:
- Journal of Telecommunications and Information Technology
- Dostawca treści:
- Biblioteka Nauki
Artykuł