- Tytuł:
- Deposition of Amorphous Hydrogenated Carbon Coatings by Plasma Jet
- Autorzy:
-
Marcinauskas, L.
Grigonis, A.
Manikowski, H.
Valincius, V. - Powiązania:
- https://bibliotekanauki.pl/articles/1813408.pdf
- Data publikacji:
- 2008-03
- Wydawca:
- Polska Akademia Nauk. Instytut Fizyki PAN
- Tematy:
-
81.15.-z
81.05.Uw
78.30.-j - Opis:
- In this study amorphous hydrogenated carbon films (a-C:H) were formed on Si (111) from an $Ar-C_2H_2$ and $Ar-C_2H_2-H_2$ gas mixtures at 1000 Pa pressure using a plasma jet chemical vapour deposition. It is shown that by varying the $Ar:C_2H_2$ ratio and adding the hydrogen gas in plasma, the structure, surface morphology, growth rate of the coatings, and consequently their optical properties can be controlled.
- Źródło:
-
Acta Physica Polonica A; 2008, 113, 3; 1063-1066
0587-4246
1898-794X - Pojawia się w:
- Acta Physica Polonica A
- Dostawca treści:
- Biblioteka Nauki
Artykuł