- Tytuł:
- Soft X-Ray Spectromicroscopy and its Application to Semiconductor Microstructure Characterization
- Autorzy:
-
Gozzo, F.
Franck, K.
Howells, M. R.
Hussain, Z.
Warwick, A.
Padmore, H. A.
Triplett, B. B. - Powiązania:
- https://bibliotekanauki.pl/articles/1963346.pdf
- Data publikacji:
- 1997-04
- Wydawca:
- Polska Akademia Nauk. Instytut Fizyki PAN
- Tematy:
-
61.16.-d
85.40.-e
79.60.-i - Opis:
- The universal trend towards device miniaturization has driven the semiconductor industry to develop sophisticated and complex instrumentation for the characterization of microstructures. Many significant problems of relevance to the semiconductor industry cannot be solved with conventional analysis techniques, but can be addressed with soft X-ray spectromicroscopy. An active spectromicroscopy program is being developed at the Advanced Light Source, attracting both the semiconductor industry and the materials science academic community. Examples of spectromicroscopy techniques are presented. An Advanced Light Source μ-XPS spectromicroscopy project is discussed, involving the first microscope completely dedicated and designed for microstructure analysis on patterned silicon wafers.
- Źródło:
-
Acta Physica Polonica A; 1997, 91, 4; 697-705
0587-4246
1898-794X - Pojawia się w:
- Acta Physica Polonica A
- Dostawca treści:
- Biblioteka Nauki
Artykuł