Temat: MEMS modeling - Katalog OPAC zbiorów

Skocz do pozycji: 1.

Tytuł:: Modeling of vibrating angular. Motion sensor in Matlab/SIMULINK
Autorzy:: Nazdrowicz, Jacek
Powiązania:: https://bibliotekanauki.pl/articles/397700.pdf
Data publikacji:: 2018
Wydawca:: Politechnika Łódzka. Wydział Mikroelektroniki i Informatyki
Tematy:: microelectromechanical systems
simulation model
microaccelerometer
MATLAB
SIMULINK
MEMS modeling
Simscape toolbox
mikroukład elektromechaniczny
model symulacyjny
mikroakcelerometr
modelowanie MEMS
SimScape
Opis:: This paper presents different models and results of simulations of MEMS vibrating gyroscope in Matlab/SIMULINK environment. Each model is created with different approach, using different blocks and different physics. Therefore author presents his proposal of mathematical, electrical equivalent and physical models. Results obtained from these models can give some hints regarding design and dimensions of some crucial parts of MEMS gyroscope. Here, decoupled vibrating sensor is considered, which minimize drive and sense motion mutual influence.
Źródło:: International Journal of Microelectronics and Computer Science; 2018, 9, 1; 27-32
2080-8755
2353-9607
Pojawia się w:: International Journal of Microelectronics and Computer Science
Dostawca treści:: Biblioteka Nauki

Artykuł

Zmień widok

na półce

Skocz do pozycji: 2.

Tytuł:: MEMS accelerometer simulations in Matlab/SIMULINK and COMSOL Multiphysics
Autorzy:: Nazdrowicz, J.
Powiązania:: https://bibliotekanauki.pl/articles/397778.pdf
Data publikacji:: 2017
Wydawca:: Politechnika Łódzka. Wydział Mikroelektroniki i Informatyki
Tematy:: microelectromechanical systems
simulation model
microaccelerometer
MATLAB
SIMULINK
MEMS modeling
SimScape toolbox
mikroukład elektromechaniczny
model symulacyjny
mikroakcelerometr
modelowanie MEMS
SimScape
Opis:: In this paper modelling and simulation of MEMS accelerometers in Matlab/SIMULINK environment are presented. Results of simulations of three different approaches: mathematical, electrical equivalent and physical models are compared with FEM accelerometer model created in COMSOL software. Results of simulations are analyzed for displacement response for two of the most popular spring geometries - folded and straight. Author takes into consideration crucial aspects of damping coefficients influence on accelerometer performance.
Źródło:: International Journal of Microelectronics and Computer Science; 2017, 8, 4; 161-167
2080-8755
2353-9607
Pojawia się w:: International Journal of Microelectronics and Computer Science
Dostawca treści:: Biblioteka Nauki

Artykuł

Zmień widok

na półce

Skocz do pozycji: 3.

Tytuł:: Modeling and simulations of MEMS gyroscope with MATLAB/SIMULINK package
Autorzy:: Nazdrowicz, J.
Powiązania:: https://bibliotekanauki.pl/articles/397914.pdf
Data publikacji:: 2017
Wydawca:: Politechnika Łódzka. Wydział Mikroelektroniki i Informatyki
Tematy:: MEMS
gyroscope
angular velocity sensor
microelectromechanical systems
model simulation
microaccelerometer
MATLAB
SIMULINK
MEMS modeling
equivalent circuit model
żyroskop
czujnik prędkości kątowej
mikroukład elektromechaniczny
model symulacyjny
akcelerometr
modelowanie MEMS
model obwodu zastępczego
Opis:: This paper presents developed mathematical model of MEMS gyroscope created in Matlab/SIMULINK environment. The model can be very useful for calculating MEMS gyroscope geometrical parameters. These parameters play very significant role, because they have huge and direct impact on device response, performance and further possibilities of application. Results of simulations are presented in this article separately for drive and sense direction. In addition there are also results in frequency domain presented. With all these results we obtain quick overview of behavior this kind of MEMS device and response characteristics.
Źródło:: International Journal of Microelectronics and Computer Science; 2017, 8, 1; 21-28
2080-8755
2353-9607
Pojawia się w:: International Journal of Microelectronics and Computer Science
Dostawca treści:: Biblioteka Nauki

Artykuł

Zmień widok

na półce

Skocz do pozycji: 4.

Tytuł:: 1-D equivalent circuit for RF MEMS capacitive switch
Autorzy:: Kula, S.
Powiązania:: https://bibliotekanauki.pl/articles/377903.pdf
Data publikacji:: 2014
Wydawca:: Politechnika Poznańska. Wydawnictwo Politechniki Poznańskiej
Tematy:: RF MEMS switch
equivalent circuits for MEMS
multiphysics modeling
Opis:: In this paper the equivalent circuit for an accurate model of the RF (Radio Frequency) MEMS (Micro Electro-Mechanical Systems) capacitive switch is presented. The capacitive switch consists of a thin metal membrane, which name is bridge suspended over central conductor and connected at both ends to the ground conductor of CPW (coplanar waveguide). The equivalent circuit was created based on multi-physic modelling, elements analogues, and electrical equivalences. Mechanical and electrical forces are included in the equivalent circuit as current sources. The usefulness and effectiveness of the model was verified through results comparison with the commercial APLAC software and mathematical modelling in Matlab software. The novelty of the paper is the equivalent circuit, which is useful to simulate linear and non-linear cases of the RF MEMS capacitive switch and also the novelty is an implementation of the equivalent circuit in LTSpice, which is a freeware circuits simulator.
Źródło:: Poznan University of Technology Academic Journals. Electrical Engineering; 2014, 80; 175-181
1897-0737
Pojawia się w:: Poznan University of Technology Academic Journals. Electrical Engineering
Dostawca treści:: Biblioteka Nauki

Artykuł

Zmień widok

na półce

Skocz do pozycji: 5.

Tytuł:: An Efficient MEMS Sensor Modelling by Geometrical Parameter Optimization
Autorzy:: Kulkarni, Vaishali Sanjay
Chorage, Suvarna Sandip
Powiązania:: https://bibliotekanauki.pl/articles/2055266.pdf
Data publikacji:: 2022
Wydawca:: Polska Akademia Nauk. Czytelnia Czasopism PAN
Tematy:: virtual IDE modelling
MEMS
sensor optimization
ANSYS modeling and applications
Opis:: Numerous technological applications use MEMS capacitive sensing technique as a major component, because of their ease of fabrication process, inexpensive and high sensitivity. The paper aims at modeling interdigitated capacitive (IDC) sensing. Virtually observe the contribution of variations in geometrical parameters to sensor efficiency and optimization factor. The sensor design is verified through ANSYS simulations. Results indicate “an efficient but poorly optimized sensor is better than a well-optimized sensor”. It is difficult to detect capacitance in the range of few pF generated using capacitive sensing. How it can be maximized with dimension optimization is focused in this paper.
Źródło:: International Journal of Electronics and Telecommunications; 2022, 68, 2; 287--291
2300-1933
Pojawia się w:: International Journal of Electronics and Telecommunications
Dostawca treści:: Biblioteka Nauki

Artykuł

Zmień widok

na półce

Skocz do pozycji: 6.

Tytuł:: Electroacoustic Analysis of a Controlled Damping Planar CMOS-MEMS Electrodynamic Microphone
Autorzy:: Tounsi, F.
Mezghani, B.
Rufer, L.
Masmoudi, M.
Powiązania:: https://bibliotekanauki.pl/articles/177602.pdf
Data publikacji:: 2015
Wydawca:: Polska Akademia Nauk. Czytelnia Czasopism PAN
Tematy:: MEMS sensor
acoustical model
monolithic electroacoustic microphone
suspended diaphragm
lumped element modeling
Opis:: This paper gives a detailed electroacoustic study of a new generation of monolithic CMOS micromachined electrodynamic microphone, made with standard CMOS technology. The monolithic integration of the mechanical sensor with the electronics using a standard CMOS process is respected in the design, which presents the advantage of being inexpensive while having satisfactory performance. The MEMS microphone structure consists mainly of two planar inductors which occupy separate regions on substrate. One inductor is fixed; the other can exercise out-off plane movement. Firstly, we detail the process flow, which is used to fabricate our monolithic microphone. Subsequently, using the analogy between the three different physical domains, a detailed electro-mechanical-acoustic analogical analysis has been performed in order to model both frequency response and sensitivity of the microphone. Finally, we show that the theoretical microphone sensitivity is maximal for a constant vertical position of the diaphragm relative to the substrate, which means the distance between the outer and the inner inductor. The pressure sensitivity, which is found to be of the order of a few tens of μV/Pa, is flat within a bandwidth from 50 Hz to 5 kHz.
Źródło:: Archives of Acoustics; 2015, 40, 4; 527-537
0137-5075
Pojawia się w:: Archives of Acoustics
Dostawca treści:: Biblioteka Nauki

Artykuł

Zmień widok

na półce

Informacja

Wyszukujesz frazę "MEMS modeling" wg kryterium: Temat

Źródło danych

Dostawca treści

Kolekcja

Rok wydania

Wydawca

Temat

Autor

Typ dokumentu

Język