- Tytuł:
- Modeling and simulations of MEMS gyroscope with MATLAB/SIMULINK package
- Autorzy:
- Nazdrowicz, J.
- Powiązania:
- https://bibliotekanauki.pl/articles/397914.pdf
- Data publikacji:
- 2017
- Wydawca:
- Politechnika Łódzka. Wydział Mikroelektroniki i Informatyki
- Tematy:
-
MEMS
gyroscope
angular velocity sensor
microelectromechanical systems
model simulation
microaccelerometer
MATLAB
SIMULINK
MEMS modeling
equivalent circuit model
żyroskop
czujnik prędkości kątowej
mikroukład elektromechaniczny
model symulacyjny
akcelerometr
modelowanie MEMS
model obwodu zastępczego - Opis:
- This paper presents developed mathematical model of MEMS gyroscope created in Matlab/SIMULINK environment. The model can be very useful for calculating MEMS gyroscope geometrical parameters. These parameters play very significant role, because they have huge and direct impact on device response, performance and further possibilities of application. Results of simulations are presented in this article separately for drive and sense direction. In addition there are also results in frequency domain presented. With all these results we obtain quick overview of behavior this kind of MEMS device and response characteristics.
- Źródło:
-
International Journal of Microelectronics and Computer Science; 2017, 8, 1; 21-28
2080-8755
2353-9607 - Pojawia się w:
- International Journal of Microelectronics and Computer Science
- Dostawca treści:
- Biblioteka Nauki
Artykuł