- Tytuł:
- Analysis of Thin Films by Time-of-Flight Low Energy Ion Scattering
- Autorzy:
-
Průša, S.
Kolíbal, M.
Bábor, P.
Mach, J.
Šikola, T. - Powiązania:
- https://bibliotekanauki.pl/articles/2047292.pdf
- Data publikacji:
- 2007-03
- Wydawca:
- Polska Akademia Nauk. Instytut Fizyki PAN
- Tematy:
-
68.49.Sf
81.05.Cy
68.55.-a
81.15.Ef - Opis:
- In the paper the design and application of a time-of-flight low energy ion scattering instrument built into an UHV complex deposition and analytical apparatus is described. A special attention is aimed at demonstrating the ability of time-of-flight low energy ion scattering to analyse near-to-surface layers of thin films prepared both ex situ and in situ. It is shown that the broadening of peaks in time-of-flight low energy ion scattering spectra can be attributed to multiple scattering and inelastic losses of ions in deeper layers. As a result of that, the peak width of ultrathin films depends on their thickness.
- Źródło:
-
Acta Physica Polonica A; 2007, 111, 3; 335-341
0587-4246
1898-794X - Pojawia się w:
- Acta Physica Polonica A
- Dostawca treści:
- Biblioteka Nauki
Artykuł