- Tytuł:
- Production of Doubly Charged Ions Using a Hollow Cathode Ion Source with an Evaporator
- Autorzy:
-
Turek, M.
Droździel, A.
Pyszniak, K.
Mączka, D.
Słowiński, B. - Powiązania:
- https://bibliotekanauki.pl/articles/1400444.pdf
- Data publikacji:
- 2013-05
- Wydawca:
- Polska Akademia Nauk. Instytut Fizyki PAN
- Tematy:
-
07.77.Ka
34.80.Dp
61.72.uj - Opis:
- The paper describes the production of doubly charged ions from solids and gases using a hollow cathode ion source with an internal evaporator heated by a spiral cathode filament and arc discharge. The obtained currents were 15 μA for $Bi^{2+}$, 10 μA for $As^{2+}$ and $Al^{2+}$, 8 μA for $Kr^{2+}$ and $Xe^{2+}$, 5 μA for $In^{2+}$ and $Ge^{2+}$, enabling moderate dose implantations ( ≈ $10^{15} cm^{-3}$) with doubly charged ions. Characteristics of the ion source are presented and discussed in order to choose the optimal working parameters. A brief presentation of numerical model of doubly and singly charged ions in the ion source is given. The calculated results (dependences of ion current on the anode voltage) are in good agreement with the experimental data.
- Źródło:
-
Acta Physica Polonica A; 2013, 123, 5; 843-846
0587-4246
1898-794X - Pojawia się w:
- Acta Physica Polonica A
- Dostawca treści:
- Biblioteka Nauki
Artykuł