- Tytuł:
- Modelling of thin Si layers growth on partially masked Si substrate
- Autorzy:
-
Gułkowski, S.
Olchowik, J.M.
Jóźwik, I.
Moskvin, P.P. - Powiązania:
- https://bibliotekanauki.pl/articles/1933182.pdf
- Data publikacji:
- 2008
- Wydawca:
- Politechnika Gdańska
- Tematy:
-
epitaxial lateral overgrowth
liquid-phase epitaxial growth
computer simulations - Opis:
- This paper presents a numerical simulation of epitaxial lateral overgrowth of silicon layers from the liquid phase of an Sn solvent. A two-dimensional diffusion equation has been solved and the concentration profiles of Si in a Si-Sn rich solution during the growth have been constructed. The epilayer thickness and width have been obtained from the concentration near the interface.
- Źródło:
-
TASK Quarterly. Scientific Bulletin of Academic Computer Centre in Gdansk; 2008, 12, 1-2; 121-126
1428-6394 - Pojawia się w:
- TASK Quarterly. Scientific Bulletin of Academic Computer Centre in Gdansk
- Dostawca treści:
- Biblioteka Nauki
Artykuł