- Tytuł:
- Optimization of radio frequency inductively coupled plasma enhanced chemical vapour deposition process of diamond-like carbon films
- Autorzy:
-
Kijaszek, W.
Oleszkiewicz, W. - Powiązania:
- https://bibliotekanauki.pl/articles/174787.pdf
- Data publikacji:
- 2016
- Wydawca:
- Politechnika Wrocławska. Oficyna Wydawnicza Politechniki Wrocławskiej
- Tematy:
-
diamond-like carbon
radio frequency inductively coupled plasma enhanced chemical vapour deposition RF ICP PECVD
Raman scattering spectroscopy
spectroscopic ellipsometry - Opis:
- The diamond-like carbon materials have unique mechanical, optical, electrical and chemical properties. The material is commonly applied in automotive industry, medicine and in other everyday life products. However, the diamond-like carbons are not used in micro- and optoelectronics on a wider scale due to technological problems. The application of the diamond-like carbon films in electronic structure is limited because the standard methods do not ensure that the quality and properties of the deposited film will be satisfactory for a specific application. On the other hand, more sophisticated methods that allow manufacturing the diamond-like carbon film with adequate properties, such as microwave assisted chemical vapour deposition, require heating of the substrate to high temperature (above 1000°C). The solution to the problem is the radio frequency inductively coupled plasma enhanced chemical vapour deposition method that allows deposition of the diamond-like carbon films with satisfactory properties and the process can be carried out at room temperature. In the paper, basic information and issues concerning the diamond-like carbon films manufacturing technology by radio frequency inductively coupled plasma enhanced chemical vapour deposition method will be explained. The diamond-like carbon films were investigated by the Raman scattering spectroscopy and the spectroscopic ellipsometry.
- Źródło:
-
Optica Applicata; 2016, 46, 2; 167-172
0078-5466
1899-7015 - Pojawia się w:
- Optica Applicata
- Dostawca treści:
- Biblioteka Nauki
Artykuł