- Tytuł:
- Operation modes of the FALCON ion source as a part of the AMS cluster tool
- Autorzy:
-
Girka, O.
Bizyukov, A.
Bizyukov, I.
Gutkin, M.
Mishin, S. - Powiązania:
- https://bibliotekanauki.pl/articles/146245.pdf
- Data publikacji:
- 2015
- Wydawca:
- Instytut Chemii i Techniki Jądrowej
- Tematy:
-
FALCON
ion source
surface wave
cluster tool - Opis:
- The paper investigates the options to increase the production yield of temperature compensated surface acoustic wave (SAW) devices with a defi ned range of operational frequencies. The paper focuses on the preparation of large wafers with SiO2 and AlN/Si3N4 depositions. Stability of the intermediate SiO2 layer is achieved by combining high power density UV radiation with annealing in high humidity environment. A uniform thickness of the capping AlN layer is achieved by local high-rate etching with a focused ion beam emitted by the FALCON ion source. Operation parameters and limitations of the etching process are discussed.
- Źródło:
-
Nukleonika; 2015, 60, 2; 327-330
0029-5922
1508-5791 - Pojawia się w:
- Nukleonika
- Dostawca treści:
- Biblioteka Nauki
Artykuł