- Tytuł:
- Experimental study of non-measured points on surface measurement using structured illumination microscopy
- Autorzy:
-
Li, Zhen
Gröger, Sophie - Powiązania:
- https://bibliotekanauki.pl/articles/2173900.pdf
- Data publikacji:
- 2022
- Wydawca:
- Polska Akademia Nauk. Czytelnia Czasopism PAN
- Tematy:
-
non-measured points
structured illumination microscopy
areal surface texture parameters
measurement uncertainty - Opis:
- Non-measured points (NMPs) are one of vital problems in optical measurement. The number and location of NMPs affect the obtained surface texture parameters. Therefore, systematic studying of the NMP is meaningful in understanding the instrument performance and optimizing measurement strategies. This paper investigates the influence of measurement settings on the non-measured points ratio (NMPR) using structured illumination microscopy. It is found that using a low magnification lens, high exposure time, high dynamic range (HDR) lighting levels, and low vertical scanning interval may help reduce the NMPR. In addition, an improved approach is proposed to analyze the influence of NMP on areal surface texture parameters. The analysis indicates that the influence of NMP on some parameters cannot be ignored, especially for extreme height parameters and feature parameters.
- Źródło:
-
Metrology and Measurement Systems; 2022, 29, 4; 763--778
0860-8229 - Pojawia się w:
- Metrology and Measurement Systems
- Dostawca treści:
- Biblioteka Nauki
Artykuł