- Tytuł:
- Study of Magnetic Micro-Ellipses by Cantilever Sensor
- Autorzy:
-
Sečianska, K.
Šoltýs, J.
Cambel, V. - Powiązania:
- https://bibliotekanauki.pl/articles/1032826.pdf
- Data publikacji:
- 2017-04
- Wydawca:
- Polska Akademia Nauk. Instytut Fizyki PAN
- Tematy:
-
85.70.Ay
85.85.+j
81.16.Nd - Opis:
- In this paper, we propose a method for prototyping cantilever sensors by means of a modification of commercial atomic force microscopy cantilevers, using electron beam lithography and focused ion beam milling. To overcome obstacles with resist coating related to spin-coating of nonplanar 3D substrates, in this case of free-standing cantilevers, we propose a modified method based on spin-coating technique. An auxiliary atomic force microscopy chip was inserted below the cantilever to quasi-planarize the surface during spin-coating of electron beam resist. Magnetic micro-ellipses were prepared at the free-end of the cantilever by electron beam lithography. We propose a design of a cantilever sensor for the study of magnetic coupling between two cantilevers, prepared by focused ion beam milling. In ideal case, the coupling could be detected by a shift in resonance peaks. Attractive and repulsive forces between magnetic structures were shown by magnetic force microscopy.
- Źródło:
-
Acta Physica Polonica A; 2017, 131, 4; 833-835
0587-4246
1898-794X - Pojawia się w:
- Acta Physica Polonica A
- Dostawca treści:
- Biblioteka Nauki
Artykuł