- Tytuł:
- Active Stabilization of the Beam Pointing of a High- Power KrF Laser System
- Autorzy:
-
Barna, A.
Földes, I. B.
Bohus, J.
Szatmári, S. - Powiązania:
- https://bibliotekanauki.pl/articles/221761.pdf
- Data publikacji:
- 2015
- Wydawca:
- Polska Akademia Nauk. Czytelnia Czasopism PAN
- Tematy:
-
diffraction-limited UV pulse
beam-pointing stabilization
long-term drift
photodiode - Opis:
- An active beam-pointing stabilization system has been developed for a high-power KrF laser system to eliminate the long-term drift of the directional change of the beam in order to have a stable focusing to a high intensity. The control of the beam direction was achieved by a motor-driven mirror activated by an electric signal obtained by monitoring the position of the focus of the output beam. Instead of large sized UV-sensitive position sensitive detectors a simple arrangement with scatter plates and photodiodes are used to measure the directionality of the beam. After the beam stabilization the long-term residual deviation of the laser shots is ~14 μrad, which is comparable to the shot-to-shot variation of the beam (~12 μrad). This deviation is small enough to keep the focal spot size in a micrometer range when tightly focusing the beam using off-axis parabolic mirrors.
- Źródło:
-
Metrology and Measurement Systems; 2015, 22, 1; 165-172
0860-8229 - Pojawia się w:
- Metrology and Measurement Systems
- Dostawca treści:
- Biblioteka Nauki
Artykuł