- Tytuł:
- SPM Characterization of Titanium Disilicide Nanostructures Grown on a Ni-Modified Si(100) Substrate
- Autorzy:
-
Koczorowski, W.
Bazarnik, M.
Czajka, R. - Powiązania:
- https://bibliotekanauki.pl/articles/1493616.pdf
- Data publikacji:
- 2011-09
- Wydawca:
- Polska Akademia Nauk. Instytut Fizyki PAN
- Tematy:
-
68.37.Ef
68.37.Ps - Opis:
- The paper presents our recent investigations of the early stage growth of titanium silicides on a modified Si(100) substrate. The substrate was modified by deposition of a minute amount of Ni atoms, and the subsequent flash annealing. This process led to the creation of parallel defect lines on the Si(100) surface. We expected TiSi_2 to form elongated structures on top and/or between the defect lines. Though this idea failed, stable nanostructures were observed and characterized using scanning probe microscopy (scanning tunneling microscopy and atomic force microscopy) methods.
- Źródło:
-
Acta Physica Polonica A; 2011, 120, 3; 480-484
0587-4246
1898-794X - Pojawia się w:
- Acta Physica Polonica A
- Dostawca treści:
- Biblioteka Nauki
Artykuł