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Wyszukujesz frazę "plasma implantation" wg kryterium: Temat


Wyświetlanie 1-2 z 2
Tytuł:
Post acceleration of ions emitted from laser and spark - generated plasmas
Autorzy:
Torrisi, L.
Cavallaro, S.
Rosiński, M.
Nassisi, V.
Paperny, V.
Romanov, I.
Powiązania:
https://bibliotekanauki.pl/articles/146658.pdf
Data publikacji:
2012
Wydawca:
Instytut Chemii i Techniki Jądrowej
Tematy:
post ion acceleration
laser plasma
ion beam
ion implantation
Opis:
Pulsed lasers at intensities of the order of 1010 W/cm2 interacting with solid matter in vacuum, produce hot plasmas at high temperatures and densities. The charge state distributions of the plasma generate a high electric field, which induces high ion acceleration along the normal to the target surface. The high yield of the emitted ions can generate a near constant current by using repetitive pulses irradiating thick targets. In order to increase ion energy, a post-acceleration system can be employed by using acceleration voltages above 10 kV. Special ion extraction methods can be employed to generate the final ion beam, which is multi-ionic and multi-energetic, due to the presence of different ion species and of different charge states. In this article four different methods of post ion acceleration, employed at the INFN-LNS of Catania, at the IPPLM of Warsaw, at the INFN of Lecce and at the LPI of Moscow, are presented, discussed and compared. All methods are able to implant ions in different substrates at different depth and at different dose-rates.
Źródło:
Nukleonika; 2012, 57, 3; 323-332
0029-5922
1508-5791
Pojawia się w:
Nukleonika
Dostawca treści:
Biblioteka Nauki
Artykuł
Tytuł:
Post-acceleration of ions from the laser-generated plasma
Autorzy:
Giuffrida, L.
Torrisi, L.
Powiązania:
https://bibliotekanauki.pl/articles/146664.pdf
Data publikacji:
2011
Wydawca:
Instytut Chemii i Techniki Jądrowej
Tematy:
laser ablation
laser-plasma
post-acceleration
ion implantation
Rutherford backscattering spectrometry (RBS) analysis
Opis:
An application of the laser-generated plasma for multi-energetic ion implantation is reported. In an experiment performed at Istituto Nazionale di Fisica Nucleare, Laboratori Nazionali del Sud (INFN-LNS) of Catania, Italy the Nd:YAG laser was used, operating at the 1064 nm wavelength with the intensity of 1010 W/cm2. A laser pulse of 9 ns duration and 300 mJ energy was employed to ablate a solid target placed in a high vacuum. The free ion expansion occurred in a constant potential chamber placed at 30 kV positive voltage with respect to the ground, which allowed to extract ions with energy proportional to the charge state. In an another experiment, performed at the PALS Prague laser facility (1315 nm, 400 ps pulse width and the laser pulse energy delivered on target equal to about 35 J) Ti ions were obtained through the ablation of solid targets in vacuum by means of 1015 W/cm2 laser pulses. In both cases ion energy analyzers were used to measure the energy-to-charge ratio of the ions. The ion energy distribution was determined from the time-of-flight measurements. The depth profiles measured through Rutherford backscattering spectrometry (RBS) analysis are in good agreement with the ion energy analyzer spectroscopy measurements.
Źródło:
Nukleonika; 2011, 56, 2; 161-163
0029-5922
1508-5791
Pojawia się w:
Nukleonika
Dostawca treści:
Biblioteka Nauki
Artykuł
    Wyświetlanie 1-2 z 2

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