- Tytuł:
- Quintet-gated FEA to form crossover beam
- Autorzy:
-
Tagami, T.
Takeda, M.
Horie, S.
Yoshida, T.
Nagao, M.
Neo, Y.
Aoki, T.
Mimura, H.
Kanemaru, S. - Powiązania:
- https://bibliotekanauki.pl/articles/385271.pdf
- Data publikacji:
- 2009
- Wydawca:
- Sieć Badawcza Łukasiewicz - Przemysłowy Instytut Automatyki i Pomiarów
- Tematy:
-
FEA
beam - Opis:
- In this report, we have described about new field emission array (FEA) structure built-in micro-column. This newly proposed FEA has multi-gated structured and is designed to form a crossover. We had already demonstrated the quad- and quintet- gated FEA. A crossover formation by was successfully observed for the first time. by the quintetgated FEA Furthermore electron beam lithography was demonstrated.
- Źródło:
-
Journal of Automation Mobile Robotics and Intelligent Systems; 2009, 3, 4; 157-158
1897-8649
2080-2145 - Pojawia się w:
- Journal of Automation Mobile Robotics and Intelligent Systems
- Dostawca treści:
- Biblioteka Nauki
Artykuł