- Tytuł:
- On changing the properties of a multilayer structure by preliminary processing of a substrate
- Autorzy:
- Pankratov, Evgeny L.
- Powiązania:
- https://bibliotekanauki.pl/articles/29520076.pdf
- Data publikacji:
- 2022
- Wydawca:
- Akademia Górniczo-Hutnicza im. Stanisława Staszica w Krakowie. Wydawnictwo AGH
- Tematy:
-
gas phase epitaxy
improvement of properties of films
analytical approach for modeling - Opis:
- In this paper, the effect of the preliminary processing of a substrate on the properties of a grown heterostructure is investigated. It is shown that the growth of an epitaxial layer on a buffer layer after preliminary annealing (before the growth) makes it possible to decrease the value of mismatch-induced stress. An analytical approach has been introduced for the analysis of mass and heat transfer in a multilayer structure accounting for mismatch-induced stress.
- Źródło:
-
Computer Methods in Materials Science; 2022, 22, 2; 89-100
2720-4081
2720-3948 - Pojawia się w:
- Computer Methods in Materials Science
- Dostawca treści:
- Biblioteka Nauki
Artykuł