- Tytuł:
- Surface Property of Indium Tin Oxide (ITO) After Various Methods of Cleaning
- Autorzy:
-
Kim, K.
Ihm, K.
Kim, B. - Powiązania:
- https://bibliotekanauki.pl/articles/1401317.pdf
- Data publikacji:
- 2015-04
- Wydawca:
- Polska Akademia Nauk. Instytut Fizyki PAN
- Tematy:
- 73.20.-r
- Opis:
- We investigated the surface property change of indium tin oxide (ITO) with the various cleaning methods, using photoemission spectroscopy (PES), work function change and near-edge X-ray adsorption fine structure (NEXAFS). The detergent treatments of ITO with acetone (C₃H₆O), methanol (CH₄O), 2-propanol (C₃H₈O), and deionized (D) water yielded work function shifts as high as 0.99 eV compared to the no-treatment ITO. In contrast, work function shifts of 0.10-0.35 eV were measured after other treatments. The lowest C 1s concentration was obtained after O2 plasma treatment of ITO. There was no big change in the peak position and the shape of $In 3d^{5//2}$, and $Sn 3d^{5//2}$ after each treatment. But C 1s and O 1s spectra shows a peak shift and shape change. Presence of carbon can be minimized by NaOH treatment combined with oxygen plasma. In NEXAFS spectra of C K-edge on each sample, we found two π-binding states whose positions are 284.5 and 287.9 eV, C=C and C=O, respectively.
- Źródło:
-
Acta Physica Polonica A; 2015, 127, 4; 1176-1179
0587-4246
1898-794X - Pojawia się w:
- Acta Physica Polonica A
- Dostawca treści:
- Biblioteka Nauki
Artykuł