- Tytuł:
- Micro-Raman Investigation of Hydrogen Localized in Cone-Shaped Defects Formed on the Silicon Wafer Surface
- Autorzy:
-
Frantskevich, N.
Fedotov, A.
Frantskevich, A.
Mazanik, N. - Powiązania:
- https://bibliotekanauki.pl/articles/1366278.pdf
- Data publikacji:
- 2014-06
- Wydawca:
- Polska Akademia Nauk. Instytut Fizyki PAN
- Tematy:
-
78.30.Am
61.72.uf - Opis:
- The goal of this work is the micro-Raman study of molecular hydrogen localized in cone-shaped defects, which are formed on the surface of previously helium implanted and annealed Czochralski Si wafers as a result of hydrogen plasma treatment. The line at ≈ 4158 $cm^{-1}$ corresponding to molecular hydrogen is observed in the Raman spectra when the laser beam is focused both on cone-shaped defects or defect-free regions of the surface. The laser irradiation of cone-shaped defects during micro-Raman experiments leads to intensity increase of this line when the irradiation time is increasing, with subsequent appearance of lines at ≈ 3621 and ≈ 3698 $cm^{-1}$ and simultaneous disappearance of 4158 $cm^{-1}$ line. No such effect was observed when the laser beam was focused on defect-free regions. The experiments have shown that heat treatment of the samples studied causes the appearance in the Raman spectra of lines at ≈ 3468, ≈ 3621, and ≈ 3812 $cm^{-1}$, which can be associated with molecular hydrogen.
- Źródło:
-
Acta Physica Polonica A; 2014, 125, 6; 1332-1334
0587-4246
1898-794X - Pojawia się w:
- Acta Physica Polonica A
- Dostawca treści:
- Biblioteka Nauki
Artykuł