- Tytuł:
- Imaging and Patterning on Nanometer Scale Using Coherent EUV Light
- Autorzy:
-
Wachulak, P.
Marconi, M.
Menoni, C.
Rocca, J.
Fiedorowicz, H.
Bartnik, A. - Powiązania:
- https://bibliotekanauki.pl/articles/1539095.pdf
- Data publikacji:
- 2010-02
- Wydawca:
- Polska Akademia Nauk. Instytut Fizyki PAN
- Tematy:
-
42.25.Hz
42.40.Ht
42.40.-i
42.55.Vc - Opis:
- Extreme ultraviolet (EUV) covers wavelength range from about 5 nm to 50 nm. That is why EUV is especially applicable for imaging and patterning on nanometer scale length. In the paper periodic nanopatterning realized by interference lithography and high resolution holographic nanoimaging performed in a Gabor in-line scheme are presented. In the experiments a compact table top EUV laser was used. Preliminary studies on using a laser plasma EUV source for nanoimaging are presented as well.
- Źródło:
-
Acta Physica Polonica A; 2010, 117, 2; 403-407
0587-4246
1898-794X - Pojawia się w:
- Acta Physica Polonica A
- Dostawca treści:
- Biblioteka Nauki
Artykuł