- Tytuł:
- Nanometer-Scale Incoherent Imaging Using Laser-Plasma EUV Source
- Autorzy:
-
Wachulak, P.
Bartnik, A.
Fiedorowicz, H.
Kostecki, J. - Powiązania:
- https://bibliotekanauki.pl/articles/1490098.pdf
- Data publikacji:
- 2012-02
- Wydawca:
- Polska Akademia Nauk. Instytut Fizyki PAN
- Tematy:
-
52.38.Ph
52.50.Dg
41.50.+h
42.30.Va
42.79.Ci - Opis:
- Various imaging methods and techniques capable of reaching a nanometer spatial resolution are currently under development. One of them is an extreme ultraviolet microscopy, based on the Fresnel zone plates. In this paper a compact, high-repetition, laser-plasma EUV source, with a gas puff target, capable of emitting quasi-monochromatic radiation at 13.8 nm wavelength was used in the first demonstration of a desk-top EUV transmission microscopy with a spatial (half-pitch) resolution of 50 nm. EUV microscopy images of objects with various thicknesses and the spatial resolution measurements using the knife-edge test are presented.
- Źródło:
-
Acta Physica Polonica A; 2012, 121, 2; 450-453
0587-4246
1898-794X - Pojawia się w:
- Acta Physica Polonica A
- Dostawca treści:
- Biblioteka Nauki
Artykuł