- Tytuł:
- Study of a MEMS hybrid thermo-PZT micro actuator
- Autorzy:
-
Pourrostami, H.
Viliani, N. S. K. - Powiązania:
- https://bibliotekanauki.pl/articles/280114.pdf
- Data publikacji:
- 2016
- Wydawca:
- Polskie Towarzystwo Mechaniki Teoretycznej i Stosowanej
- Tematy:
-
hybrid micro actuator
thermo-piezoelectric
deflection
force analysis - Opis:
- The current study presents an analytical model for a MEMS cantilever based hybrid thermo- -piezoelectric micro actuator. The micro actuator structure consists of a unimorph type bending piezoelectric beam and a passive layer which uses the thermal bimorph principle. Primarily, under electrical and thermal loadings, the governing equations of motion are derived. After verification of the results, the deflection analysis of the micro actuator is performed. Moreover, the equivalent force at the actuator tip is obtained. To provide efficient optimization, the effects of the micro actuator geometrical and materials properties on the actuator tip deflection and force are investigated.
- Źródło:
-
Journal of Theoretical and Applied Mechanics; 2016, 54, 4; 1309-1318
1429-2955 - Pojawia się w:
- Journal of Theoretical and Applied Mechanics
- Dostawca treści:
- Biblioteka Nauki
Artykuł