- Tytuł:
- Verilog – ams model of comb-drive sensing element of integrated capacitive microaccelerometer for behavioral level of computer aid design
- Autorzy:
-
Holovatyy, A.
Teslyuk, V.
Lobur, M. - Powiązania:
- https://bibliotekanauki.pl/articles/411193.pdf
- Data publikacji:
- 2014
- Wydawca:
- Polska Akademia Nauk. Oddział w Lublinie PAN
- Tematy:
-
micro-electro-mechanical systems
MEMS
micromachining technologies
micromechanical comb-drive sensing element
integrated capacitive microaccelerometer
acceleration
SMASH
Verilog-AMS hardware description language
computer-aided design - Opis:
- The article presents Verilog – AMS model of the comb-drive sensing element of the integrated capacitive microaccelerometer. The suggested model allows to simulate the reaction of the sensing element effected by the applied force of acceleration, changes of its comb-drive capacities, output voltages and currents for determining its constructive parameters and for analysis of the mechanical module of the integrated device at the behavioral level of computer-aided design.
- Źródło:
-
ECONTECHMOD : An International Quarterly Journal on Economics of Technology and Modelling Processes; 2014, 3, 4; 49-53
2084-5715 - Pojawia się w:
- ECONTECHMOD : An International Quarterly Journal on Economics of Technology and Modelling Processes
- Dostawca treści:
- Biblioteka Nauki
Artykuł