- Tytuł:
- Bilayer Structures of $NiO_{x}$ and Pd in Surface Acoustic Wave and Electrical Gas Sensor Systems
- Autorzy:
-
Jakubik, W.
Urbańczyk, M.
Maciak, E.
Pustelny, T. - Powiązania:
- https://bibliotekanauki.pl/articles/1795797.pdf
- Data publikacji:
- 2009-09
- Wydawca:
- Polska Akademia Nauk. Instytut Fizyki PAN
- Tematy:
-
43.25.Fe
77.65.Dq
43.35.Pt
68.35.Iv
07.07.Df - Opis:
- A bilayer sensor structure of nickel oxide $NiO_x$ ( ≈ 60 nm) with a very thin film of palladium (Pd ≈ 18 nm) on the top, has been studied for gas-sensing application at relatively low temperatures of about 30°C and 60°C. The bilayer structure was obtained by rf sputtering and by vacuum deposition (first the $NiO_{x}$ and then the Pd film) onto a $LiNbO_{3}$ Y-cut Z-propagating substrate, making use of the surface acoustic wave method, and additionally (in the same technological processes) onto a glass substrate with a planar microelectrode array for simultaneous monitoring of the planar resistance of the layered structure. Such a bilayer structure was investigated in a low concentration range (from 50 ppm to 400 ppm in air) of nitrogen dioxide $(NO_{2})$, carbon monoxide (CO) and ammonia $(NH_{3})$ in a dry and wet air atmosphere and in a medium hydrogen concentration (1-2.5%) in dry air. The $NiO_{x}$ and Pd bilayer structure interact rather weakly with $NO_{2}$ molecules but with CO and $NH_{3}$ this interaction is much greater, especially at higher temperature ( ≈ 60°C). The hydrogen sensitivity is on the medium level, not exceeding 600 Hz (relative change in the differential frequency of ≈ 2.3%) at interaction temperature of 35°C.
- Źródło:
-
Acta Physica Polonica A; 2009, 116, 3; 315-320
0587-4246
1898-794X - Pojawia się w:
- Acta Physica Polonica A
- Dostawca treści:
- Biblioteka Nauki