- Tytuł:
- The effects of humidity on the stability of LTCC pressure sensors
- Autorzy:
-
Santo Zarnik, M.
Belavic, D. - Powiązania:
- https://bibliotekanauki.pl/articles/221696.pdf
- Data publikacji:
- 2012
- Wydawca:
- Polska Akademia Nauk. Czytelnia Czasopism PAN
- Tematy:
-
thick-film piezoresistive sensors
capacitive pressure sensors
offset stability
relative humidity - Opis:
- LTCC-based pressure sensors are promising candidates for wet-wet applications in which the effect of the surrounding media on the sensor's characteristics is of key importance. The effect of humidity on the sensor's stability can be a problem, particularly in the case of capacitive sensors. A differential mode of operation can be a good solution, but manufacturing the appropriate sensing capacitors remains a major challenge. In the case of piezoresistive sensors the influence of humidity is less critical, but it still should be considered as an important parameter when designing sensors for low-pressure ranges. In this paper we discuss the stability of the sensors' offset characteristics, which was inspected closely using experimental and numerical analyses.
- Źródło:
-
Metrology and Measurement Systems; 2012, 19, 1; 133-140
0860-8229 - Pojawia się w:
- Metrology and Measurement Systems
- Dostawca treści:
- Biblioteka Nauki
Artykuł