Autor: Domanski, T. - Katalog OPAC zbiorów

Skocz do pozycji: 1.

Tytuł:: Adsorption properties of porous silicon
Autorzy:: Domański, K.
Grabiec, P.
Gotszalk, T.
Beck, R.B.
Dębski, T.
Rangelow, I.W.
Powiązania:: https://bibliotekanauki.pl/articles/308412.pdf
Data publikacji:: 2001
Wydawca:: Instytut Łączności - Państwowy Instytut Badawczy
Tematy:: porous silicon
cantilever beam
gas sensor
Opis:: Porous silicon shows some interesting features for micromechanical applications. Some applications make use of its high surface-to-volume ratio. A capacitive gas or humidity sensor using the adsorption of gases on the porous surface can be easily fabricated. However an opportunity for more sensitive device is given by micromechanical structure. In this paper we report on the piezoresistive cantilever beam structure with porous silicon adsorbing spot as a gas sensor.
Źródło:: Journal of Telecommunications and Information Technology; 2001, 1; 53-56
1509-4553
1899-8852
Pojawia się w:: Journal of Telecommunications and Information Technology
Dostawca treści:: Biblioteka Nauki

Artykuł

Skocz do pozycji: 2.

Tytuł:: Piezoresistive sensors for atomic force microscopy - numerical simulations by means of virtual wafer fab
Autorzy:: Dębski, T.
Barth, W.
Rangelow, I.W.
Domański, K.
Tomaszewski, D.
Grabiec, P.
Jakubowski, A.
Powiązania:: https://bibliotekanauki.pl/articles/307644.pdf
Data publikacji:: 2001
Wydawca:: Instytut Łączności - Państwowy Instytut Badawczy
Tematy:: atomic force microscopy (AFM)
piezoresistive sensors
technology simulation
technology characterization
Opis:: An important element in microelectronics is the comparison of the modelling and measurements results of the real semiconductor devices. Our paper describes the final results of numerical simulation of a micromechanical process sequence of the atomic force microscopy (AFM) sensors. They were obtained using the virtual wafer fab (VWF) software, which is used in the Institute of Electron Technology (IET). The technology mentioned above is used for fabrication of the AFM cantilevers, which has been designed for measurement and characterization of the surface roughness, the texturing, the grain size and the hardness. The simulation are very useful in manufacturing other microcantilever sensors.
Źródło:: Journal of Telecommunications and Information Technology; 2001, 1; 35-39
1509-4553
1899-8852
Pojawia się w:: Journal of Telecommunications and Information Technology
Dostawca treści:: Biblioteka Nauki

Artykuł

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