- Tytuł:
- Utilization of the cyclic interferometer in polarization phase-shifting technique to determine the thickness of transparent thin-films
- Autorzy:
-
Kaewon, Rapeepan
Pawong, Chutchai
Chitaree, Ratchapak
Lertvanithphol, Tossaporn
Bhatranand, Apichai - Powiązania:
- https://bibliotekanauki.pl/articles/173387.pdf
- Data publikacji:
- 2020
- Wydawca:
- Politechnika Wrocławska. Oficyna Wydawnicza Politechniki Wrocławskiej
- Tematy:
-
polarization phase-shifting technique
cyclic interferometric configuration
non-destructive thickness measurements
transparent thin film - Opis:
- An alternative polarization phase-shifting technique is proposed to determine the thickness of transparent thin-films. In this study, the cyclic interferometric configuration is chosen to maintain the stability of the operation against external vibrations. The incident light is simply split by a non-polarizing beam splitter cube to generate test and reference beams, which are subsequently polarized by a polarizing beam splitter. Both linearly polarized beams are orthogonal and counter-propagating within the interferometer. A wave plate is inserted into the common paths to introduce an intrinsic phase difference between the orthogonal polarized beams. A transparent thin-film sample, placed in one of the beam tracks, modifies the output signal in terms of the phase retardation in comparison with the reference beam. The proposed phase-shifting technique uses a moving mirror with a set of “fixed” polarizing elements, namely, a quarter-wave retarder and a polarizer, to facilitate phase extraction without rotating any polarizing devices. The measured thicknesses are compared with the measurements of the same films acquired using standard equipment such as the field-emission scanning electron microscope and spectroscopic ellipsometer. Experimental results with the corresponding measured values are in good agreement with commercial measurements. The system can be reliably utilized for non-destructive thickness measurements of transparent thin-films.
- Źródło:
-
Optica Applicata; 2020, 50, 1; 69-81
0078-5466
1899-7015 - Pojawia się w:
- Optica Applicata
- Dostawca treści:
- Biblioteka Nauki
Artykuł