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    Wyświetlanie 1-3 z 3
    Tytuł:
    The impact of the light exposure on the morphological properties of selected photoresists
    Autorzy:
    Sikora, Andrzej
    Janus, Paweł
    Sierakowski, Andrzej
    Powiązania:
    https://bibliotekanauki.pl/articles/174640.pdf
    Data publikacji:
    2019
    Wydawca:
    Politechnika Wrocławska. Oficyna Wydawnicza Politechniki Wrocławskiej
    Tematy:
    photolitography
    polymer degradation
    atomic force microscopy
    Opis:
    In this paper we present the investigation aimed at the photoresist roughness change determination as a reliable estimator of the exposition rate in the processing verification in semiconductor industry. By employing atomic force microscopy as the 3D high resolution surface imaging tool, we tested twelve popular photoresists in terms of the morphological properties changes, while the following radiation doses were applied. Basing on high precision, and repetitive sample positioning, it was possible to perform the tests with high degree of confidence and observe the roughness change dynamics. Various profiles of roughness changes were observed, showing the need for individual study of each material. Moreover, it was possible to select the photoresists which due to poor homogeneity and small roughness changes are not suitable to such a verification. According to our knowledge, no such study was performed so far.
    Źródło:
    Optica Applicata; 2019, 49, 1; 177-185
    0078-5466
    1899-7015
    Pojawia się w:
    Optica Applicata
    Dostawca treści:
    Biblioteka Nauki
    Artykuł
    Tytuł:
    Development and utilization of the nanomarkers for precise AFM tip positioning in the investigation of the surface morphology change
    Autorzy:
    Sikora, A
    Powiązania:
    https://bibliotekanauki.pl/articles/174750.pdf
    Data publikacji:
    2013
    Wydawca:
    Politechnika Wrocławska. Oficyna Wydawnicza Politechniki Wrocławskiej
    Tematy:
    atomic force microscopy (AFM)
    material science
    environmental tests
    nanolithography
    nanomarker
    Opis:
    The investigation of the surface properties changes at micrometer and nanometer scale, due to the presence of various factors such as: temperature, solar radiation or magnetic field, requires suitable diagnostic methods. Atomic force microscopy (AFM) is one of the most popular measurement techniques providing necessary resolution. As complex experiments may require multiple moving of the sample between instruments and AFM, one can find quantitative comparison of the results unreliable when the measurements are performed without precise positioning of investigated surface and different areas are analyzed. In this work, the utilization of the nanoscratching method in terms of development of the nanomarkers set is presented, as the solution for precise positioning of the sample in order to perform the multi-step imaging of small surface area (1 μm×1 μm). Various materials were used to verify the versatility of the developed method. Also, the observation of the influence of the UV radiation on the polycarbonate sample was demonstrated as the example proving the application potential of the approach.
    Źródło:
    Optica Applicata; 2013, 43, 1; 163-171
    0078-5466
    1899-7015
    Pojawia się w:
    Optica Applicata
    Dostawca treści:
    Biblioteka Nauki
    Artykuł
    Tytuł:
    The MFM studies of the surface domain structure of Sm–Fe–Co–Zr–Cu thin ribbons
    Autorzy:
    Dośpiał, M
    Nabiałek, M.
    Szota, M
    Michta, Ł
    Wieczorek, P
    Błoch, K
    Pietrusiewicz, P
    Oźga, K
    Michalczyk, J
    Powiązania:
    https://bibliotekanauki.pl/articles/173524.pdf
    Data publikacji:
    2013
    Wydawca:
    Politechnika Wrocławska. Oficyna Wydawnicza Politechniki Wrocławskiej
    Tematy:
    atomic/magnetic force microscopy (AFM/MFM)
    surface domain structure
    melt spinning method
    Sm–Co alloys
    hard magnetic magnets
    Opis:
    The article contains studies of micro- and domain structures obtained using atomic/magnetic force microscopy (AFM/MFM) of melt-spun Sm12.5Fe8Co65.5Zr1Cu13 thin ribbons in the as-cast state. In order to obtain the SmCo8.5 type of structure in the Sm–Fe–Co–Zr–Cu alloy, thin ribbons were manufactured using the melt-spinning method with large linear velocity of a copper wheel and proper selection of alloying elements. The obtained samples in the as-cast state were magnetized. The microscopic results were also supported by magnetic measurements performed on a vibrating sample magnetometer as well as by a quantitative analysis of phase composition obtained using the Rietveld refinement method.
    Źródło:
    Optica Applicata; 2013, 43, 1; 195-200
    0078-5466
    1899-7015
    Pojawia się w:
    Optica Applicata
    Dostawca treści:
    Biblioteka Nauki
    Artykuł
      Wyświetlanie 1-3 z 3

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