- Tytuł:
- Metrology and control of electromagnetically actuated cantilevers using optical beam deflection method
- Autorzy:
-
Kopiec, Daniel
Majstrzyk, Wojciech
Pruchnik, Bartosz
Gacka, Ewelina
Badura, Dominik
Sierakowski, Andrzej
Janus, Paweł
Gotszalk, Teodor - Powiązania:
- https://bibliotekanauki.pl/articles/2052166.pdf
- Data publikacji:
- 2021
- Wydawca:
- Polska Akademia Nauk. Czytelnia Czasopism PAN
- Tematy:
-
optical beam deflection
thermomechanical noise
low frequency noise
electromagnetically actuated cantilever
Lorentz force - Opis:
- In this paper, we present metrology and control methods and techniques for electromagnetically actuated microcantilevers. The electromagnetically actuated cantilevers belong to the micro electro mechanical systems (MEMS), which can be used in high resolution force and mass change investigations. In the described experiments, silicon cantilevers with an integrated Lorentz current loop were investigated. The electromagnetically actuated cantilevers were characterized using a modified optical beam deflection (OBD) system, whose architecture was optimized in order to increase its resolution. The sensitivity of the OBD system was calibrated using a reference cantilever, whose spring constant was determined through thermomechanical noise analysis registered interferometrically. The optimized and calibrated OBD system was used to observe the resonance and bidirectional static deflection of the electromagnetically deflected cantilevers. After theoretical analysis and further experiments, it was possible to obtain setup sensitivity equal to 5.28 mV/nm.
- Źródło:
-
Metrology and Measurement Systems; 2021, 28, 4; 627-642
0860-8229 - Pojawia się w:
- Metrology and Measurement Systems
- Dostawca treści:
- Biblioteka Nauki
Artykuł